Beam Scanning Controller for Proton-Beam Writing

A scanning control system of the ion beam MeV energies has been developed for nuclear microprobe and proton-beam writing channel as a part accelerator-analytical complex based on Sokol electrostatic accelerator Institute Applied Physics National Academy Sciences Ukraine. The was put into operation to replace obsolete one microcontrollers. is Instruments reconfigurable module with Field Programmable Gate Array. operates in real time connected personal computer by high-speed PCI-Express interface data buffering. provides two main modes operation: exposure sample areas given profile raster secondary electrons imaging or calibration grid. Profile possible both functional modes. Automatic scale scan also implemented. Using logic makes it quickly adjust conditions particular experiment available equipment. hardware capabilities allows future connect up 4 spectrometric ADC mapping elemental composition samples using Proton Induced X-ray Emission Backscattering. first experiments irradiation polymethylmethacrylate have carried out; images obtained microstructures taken electron microscope are shown. aim this work develop high-energy focused proton technique create small-sized structures special purposes, well demonstrate efficiency system.